這個工作研究變形分裂共振環的電磁共振。當光阻經過曝後烤之後，利用異丙醇對光阻顯影。由於光阻的溶脹使得分裂環全長變長以及線寬變小，因此超穎材料的共振頻譜產生紅移。此外，由於變形分裂環具有不同的週期，所以超穎材料產生Fano resonance。變形分裂環具有尖的共振峰，能夠用於高靈敏性生醫檢測。為了增加分裂環變形的種類以及提高其變形的程度，將光阻交替浸泡於異丙醇與顯影劑中。經過交替浸泡的分裂環在全長、缺口以及線寬上都不同，因此造成頻譜寬頻化。這個結果可用於開發寬頻兆赫波濾波器。將交替浸泡的樣本背面鍍上銦錫氧化物(indium tin oxide, ITO)薄膜，實驗結果顯示薄膜干涉能夠讓樣本的譜線平坦化。因此，變形超穎材料以及ITO薄膜能夠作為平頂兆赫波濾波器。這個研究利用交替浸泡法使得分裂環產生寬頻的頻譜。由於分裂環圖案以及樣本結構簡單，因此能夠用於開發寬頻超穎材料。交替浸泡法具有成本低廉、製程容易以及可重複性的優點，因此能夠大量製造寬頻超穎材料。 This work studies the electromagnetic resonance of distorted split-ring resonators (SRRs). After post exposure bake, photoresist (PR) is developed by isopropyl alcohol (IPA). The swell of the PR in the IPA solution increases the entire length of the SRRs and decreases their line width. This result gives rise to the redshift of the resonance spectrum of the SRRs. The distortion changes the period of the SRRs, causing Fano resonance. Because of the Fano resonance, the spectrum of the SRRs exhibits a sharp peak at the resonance frequency. Therefore, the distorted SRRs are ideal for use in highly sensitive biomedical detection. To increase types and degree of distortion of the SRRs, the PR patterns are soaked alternatively in IPA and a developer. After the alternate soak, the SRRs exhibit various entire lengths, gaps and line widths. In addition, the variation in each of these three dimensions exhibits great diversity. Therefore, the distorted SRRs have a broadband resonance spectrum. This result can be used to develop broadband terahertz filters. An indium tin oxide (ITO) thin film is coated on the back side of the SRR sample that undergoes the alternate soak. Experimental results reveal that the ITO thin film can flatten the spectrum of the SRR sample. Therefore, the ITO-coated SRR sample can be used to fabricate flat-top terahertz filters. This work uses the alternate soak method to broaden the resonance spectrum of the SRRs. Because of the simple SRR pattern and sample configuration, the distorted SRRs can be used to develop broadband metamaterials. The alternate soak method has the advantages of low cost, easy fabrication and repeatability. Therefore, this method can mass produce broadband terahertz filters.
