本工作研究介電物質對3DMM(Three-dimensional, 3DMM)以及平面超穎材料(planar metamaterial , PMM)的電磁共振影響。利用厚的光阻進行黃光顯影，製做出具有3D結構的超穎材料。因為3DMM具有高深寬比的銀壁，所以其兆赫波頻譜擁有高的吸收峰值。因此，3DMM對於周遭環境折射率的變化具有靈敏的響應。 3DMM的共振穿透率低於平面超穎材料，且藉由電磁模擬軟體研究這個事實的起因。3DMM可以用來做高性能的兆赫波濾波器，應用在兆赫波影像[1]以及兆赫波通訊[2]。 在模擬軟體中，使用不同折射率材料覆蓋於3DMM與PMM上，量測它們的共振頻率變化量。模擬結果發現，3DMM的頻率靈敏度為0.135 THz/RIU，而PMM的頻率靈敏度為0.84 THz/RIU。因此，3DMM比起PMM對於介電物質折射率的變化擁有較高的靈敏度。 This work studies the effect of dielectric materials on electromagnetic resonance of a bowl-shaped metamaterial (3DMM) and a planar metamaterial (PMM). 3DMM is fabricated using a thick photoresist layer. 3DMM has silver walls with a high aspect ratio. Therefore, 3DMM exhibits a strong absorption peak in its terahertz spectrum. In other words, 3DMM is sensitive to the change in the refractive index of a medium that covers the metamaterial.3DMM has a lower resonance transmittance than PMM. This result is verified by electromagnetic simulation software. 3DMM can be used to develop high-performance terahertz filters for the application of terahertz imaging and terahertz communication. The change in the resonance frequencies of 3DMM and PMM that are covered with materials with different refractive indices are simulated. The simulated results revel that 3DMM and PMM have frequency sensitivities of 0.135 and 0.84 THz/RIU, respectively. Therefore, 3DMM is more sensitive to the change in the refractive index of a medium that covers the metamaterial than PMM.
