立方石榴石結構之研製及低溫共燒陶瓷應用

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Title:	立方石榴石結構之研製及低溫共燒陶瓷應用
Other Titles:	The study of Low Temperature Co-fire Ceramic of cubic garnet structure and applications
Authors:	吳昱儒 WU, YU-RU
Contributors:	林士弘;沈俊旭 LIN, SHIH-HUNG;SHEN, JIUNN-SHIUN 電機工程學系
Keywords:	低溫微波陶瓷材料;微波元件;介電特性 Low temperature microwave dielectric materials;Microwave components;Dielectric properties
Date:	2019
Issue Date:	2019-12-16T06:53:44Z (UTC)
Abstract:	低溫共燒陶瓷(Low-Temperature Co-fired Ceramics；LTCC)技術是以陶瓷材料當作基板，除了晶片、震盪器、記憶體及大電阻與大電容外，大部分的被動元件(微帶線濾波器、天線)都能崁入基板，而達到節省空間，並使用金、銀、銅等導電性佳金屬作為電極，再用印刷塗佈電路，最後以低於銀熔點燒結而成。本論文探討Ca5-yZyNi4(VO4)6 (Z=Sr)及Ca5-yZ2yNi4(VO4)6 (Z=Li、La)低溫微波介電陶瓷在不同 y 比例時的介電特性。在本論文中，以固態合成法製備Ca5-yZyNi4(VO4)6 (Z=Sr)及Ca5-yZ2yNi4(VO4)6 (Z=Li、La)粉末作為介電材料，來探討在低溫燒結環境時的微波介電特性。Ca5-ySryNi4(VO4)6 (y=0.04)在燒結溫度965 ºC持溫4(hr)的介電常數ε_r約為9.1，品質因數Qf約為41,000 (GHz)，而溫度飄移係數τ_f約為-63 (ppmºC)。Ca5-yLi2yNi4(VO4)6 (y=0.1)在燒結溫度965 ºC持溫4(hr)的介電常數ε_r約為9.7，品質因數Qf約為25,000 (GHz)，而溫度飄移係數τ_f約為-52 (ppmºC)。Ca5-yLa2yNi4(VO4)6 (y=0.02)在燒結溫度965 ºC持溫4(hr)的介電常數ε_r約為9.3，品質因素(Qf ) 約為 39,000 (GHz)，溫度飄移係數(τ_f)約為-77 (ppm/oC)。三種材料在燒結環境下皆有著不錯的品質因素及較低的燒結溫度，低溫燒結能讓元件達到小型化的目的，所以此材料適合應用在微波元件上。濾波器模擬的部份則是使用0.96MZNT-0.04SrTiO3[燒結溫度1175 ºC、ε_r= 23.9、Qf =39,000 (GHz)、τ_f = 2.9 (ppm/°C)]來應用在Hairpin帶通濾波器上，設計其中心頻率3(GHz)。可以發現0.96MZNT-0.04SrTiO3當為基板材料時，與FR4及Al2O3相比，能夠大幅縮小濾波器面積，可以有效降低整體電路尺寸並擁有極佳之微波元件性能。 Low-temperature co-fired ceramics (LTCC) technology uses ceramic materials as the substrate. In addition to wafers, oscillators, memory and large resistors and large capacitors, most passive components (microstrip line filter) and the antenna can be inserted into the substrate to save space. A conductive metal such as gold, silver or copper is used as an electrode, and then a printing coating circuit is used. Finally sintered at a melting point lower than the silver.The microwave dielectric properties of the Ca5-yZyNi4(VO4)6 (Z=Sr) and the Ca5-yZ2yNi4(VO4)6 (Z=Li、La) ceramics compositions with different y values characteristic was investigated. Ca5-yZyNi4(VO4)6 (Z=Sr) and the Ca5-yZ2yNi4(VO4)6 (Z=Li、La) prepared by the solid state synthesis and explored its microwave dielectric properties in low temperature sintering condition. Ca5-ySr2yNi4(VO4)6 (y=0.04) sintered at 965 ºC for 4(hr) has dielectric constant (ε_r) of 9.1, a quality factor (Qf) value of 41,000 (GHz), and a temperature coefficient of resonant frequency (τ_f) value of -63 (ppm/ºC).Ca5-yLi2yNi4(VO4)6 (y=0.1) sintered at 965 ºC for (hr) has dielectric constant (ε_r) of 9.7, a quality factor (Qf) value of 25,000 (GHz), and a temperature coefficient of resonant frequency (τ_f) value of -52 (ppm/ºC). Ca5-yLa2yNi4(VO4)6 (y=0.02) sintered at 965 ºC for 4(hr) has dielectric constant (ε_r) of 9.3, a quality factor (Qf) value of 39,000 (GHz), and a temperature coefficient of resonant frequency (τ_f) value of (-77 ppm/ºC). Three kind of the compositions have good quality factor and low sintering temperature in the sintering environment. Low-temperature sintering can make the components smaller, so these materials are suitable for microwave components.The part of the filter simulation is applied to the Hairpin bandpass filter using 0.96MZNT-0.04SrTiO3[sintering temperature 1175 ºC、ε_r= 23.9、Qf =39,000 (GHz)、τ_f= 2.9 (ppm/°C)]. The center frequency is 3(GHz). Filter size could be reduced using self-made substrates 0.96MZNT-0.04SrTiO3. Therefore, overall circuit size could effectively reduce with excellent microwave component performance.
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