本論文是在探討Ag/Ir(111)和Ag/Co/Ir(111)超薄膜介面物性以及高真空濺鍍系統和薄膜量測系統之建立。對Ag/Ir(111)系統而言，在Ag厚度在4原子層以內時，從Ag的歐傑電子訊號強度和深度組成分析得知上層Ag-Ag鍵結的Ag會在溫度800 K時會略微退吸附，除此之外也發現Ag會有略微向Ir內部擴散的現象；在溫度達850 K時，Ag會幾乎全部退吸附。對2 ML Ag/x ML Co/Ir(111)系統而言，發現飽和科爾訊號強度有隨Ag膜厚震盪的現象，這個原因是因為Ag原子層半滿和全滿所造成電子密度的改變所造成。在加熱退火過程中，Ag會在溫度450 K至650 K間略微向Co內部擴散；在溫度達800 K之上，發現Ag的退吸附現象和Ag/Ir(111)系統相似；在此期間，由於Co向內部擴散跟Ir形成Co-Ir合金的關係，使得磁域被切割而造成鐵磁性消失。此外也成功建立了一套高真空濺鍍系統使得這套系統已有能力濺鍍出奈米級的薄膜，大氣磁光科爾效應儀也能測量到薄膜樣品的表面磁性，而大氣掃描穿隧顯微鏡也已具有原子級解析度；有關這個部份將對奈米薄膜在製造和物性上的應用有相當的幫助。 Interfacial properties for Ag/Ir(111) and Ag/Co/Ir(111) ultrathin films are investigated, and the constructions of a high-vacuum sputtering and thin-film measuring systems are discussed in this dissertation. For Ag/Ir(111) system with Ag thickness thinner than 4 monolayers (ML), annealing treatments at 800 K causes the desorption of Ag atoms that are initially bonded with Ag from the experimental results of attenuation of Ag Auger signal at high temperature and depth profile by argon ion sputtering. In additional, a small amount of Ag was detected to be diffused into the subsurface. At 850 K, nearly all the Ag atoms are desorbed from the surface. For 2 ML Ag/x ML Co/Ir(111) system, oscillation of remanent Kerr intensity was observed as the Ag thickness increases up to 2 ML. This behavior is attributed to the modification of electron density of state by complete and incomplete Ag layers. After annealing treatment, slight intermixing of Ag with Co was detected at temperatures between 450 and 650 K. An enhancement of the magneto-optic response was revealed by the surface magneto-optic Kerr effect (SMOKE) measurements. At annealing temperatures as high as 800 K, the phenomena of Ag desorption from the surface is similar to that in Ag/Ir(111) system. At the meanwhile, Co diffuses into the Ir substrate to form dilute Co-Ir alloy and this causes the disappearance of ferromagnetism owing to the disruptions of the magnetic domains. On the second part of this dissertation, a high-vacuum sputtering system has been constructed and this system has demonstrated to have the ability to grow nanometer-scaled thin films. The magnetic properties of the films have been investigated using a magneto-optic Kerr effect (MOKE) measuring systems. An air-scanning tunneling microscope (air-STM) system was constructed and possesses atomic resolution. This part is helpful for further applications in fabrication and characterization of nanometer-scaled thin films.
